Type Description

The 8713 Mass Flow Controller (MFC) is suitable for mass flow control of gases within a large flow range. Thermal MEMS sensors directly located in the airflow can achieve extremely high speed response. A direct acting B ü rkert proportional valve as the actuator ensures good response sensitivity. Integrated PI controller enables MFC to have excellent control characteristics. The 8713 device can calibrate for two different gases, and users can switch between the two. The communication with the superior equipment is entirely in digital form, which eliminates the need for additional digital to analog conversion. The 8713 mass flow controller is suitable for a variety of applications, such as burner control, heat treatment, material coating, biological reactors, fuel cell technology, or test benches.

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